Product Introduction:
By using color laser confocal technology, it is possible to detect the micro - and sub micron level roughness of material surfaces, and perform 2D contour/3D micro morphology scanning analysis. It has the advantages of high measurement accuracy, fast speed, and good repeatability.
This system can be used to measure large-sized samples, and the software features include powerful functions such as point measurement, line measurement, and surface measurement. Optional modules include 2D&3D roughness detection and analysis, 2D contour measurement and 3D morphology analysis, flatness detection, coplanarity detection, parallelism detection, etc.
Characteristics of this system:
1、 Adopting transmission device: driven by linear magnetic axis motor
2、 Professional Integrated Design
3、 Rich 3D measurement
4、 Diverse three-dimensional observations
technical parameter
Technical parameters:
|
Probe A |
Probe B |
Working distance |
11mm |
19mm |
range |
±190um |
±1700um |
Maximum inclination angle |
±28° |
±21° |
Spot size |
10um |
20um |
resolving power |
10nm |
40nm |
accuracy |
±0.02%F.S. |
±0.02%F.S. |
Minimum thickness measurement |
12um |
66um |
Maximum thickness measurement |
511um |
5098um |
Electric table parameters:
XY platform |
drive |
Linear magnetic axis motor |
Platform size |
220X230mm |
|
XY direction travel |
100X100mm |
|
resolving power |
0.05μm |
|
Repetitive positioning accuracy |
<1μm |
|
Maximum allowable load |
2Kg |
|
scanning speed |
≤80mm/s |
|
Scanning spacing |
≥0.5μm |
|
Electrical characteristics |
Rated input of controller (dedicated computer) |
100-240V AC 5.3A 50/60Hz |
Rated input of drive (dedicated chassis) |
48V DC 2.1A |
|
Sensor input |
24V DC 3A |